Substrate processing method, substrate processing device, lithography device, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorGENICHIROU KIYOTA
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Abstract
A substrate processing method of processing a substrate includes: performing a measurement of a light intensity distribution which is acquired from a peripheral edge portion of the substrate when the peripheral edge portion is irradiated with light from a light source unit; and identifying candidates for a peripheral edge position of the substrate on the basis of a result of the performing the measurement. A plurality of types of the results of the measurement are acquired by performing the measurement using a plurality of types of measuring conditions in one time of the measurement, and the candidates are identified from the plurality of types of results of the measurement.
Claims20
A substrate processing method of processing a substrate, the substrate processing method comprising:
- performing a measurement of a light intensity distribution which is acquired from a peripheral edge portion of the substrate when the peripheral edge portion is irradiated with light from a light source unit;
- and
- identifying candidates for a peripheral edge position of the substrate on the basis of a result of the performing the measurement,
- wherein a plurality of types of the results of the measurement are acquired by performing the measurement using a plurality of types of measuring conditions in one time of the measurement, and the candidates are identified from the plurality of types of the results of the performing the measurement.
An article manufacturing method comprising:
- performing measurement of a light intensity distribution which is acquired from a peripheral edge portion of a substrate when the peripheral edge portion is irradiated with light from a light source unit;
- identifying candidates for a peripheral edge position of the substrate on the basis of a result of the performing the measurement,
- wherein a plurality of types of the results of the measurement are acquired by performing the measurement using a plurality of types of measuring conditions in one time of the measurement, and the candidates are identified from the plurality of types of the results of the performing the measurement,
- forming a pattern on the substrate;
- and
- manufacturing an article from the substrate on which the pattern has been formed.
A substrate processing device that processes a substrate, the substrate processing device comprising:
- a measurement unit configured to measure a light intensity distribution which is acquired from a peripheral edge portion of the substrate when the peripheral edge portion is irradiated with light;
- and
- a control unit configured to control positioning of the substrate,
- wherein the control unit acquires a plurality of types of the results of measurement by causing the measurement unit to perform a measurement using a plurality of types of measuring conditions in one time of the measurement and identifies candidates for a peripheral edge position of the substrate from each of the plurality of types of results of measurement.
A lithography device that forms a pattern on a substrate, the lithography device comprising:
- a substrate processing device that includes:
- a measurement unit configured to measure a light intensity distribution which is acquired from a peripheral edge portion of the substrate when the peripheral edge portion is irradiated with light;
- and
- a control unit configured to control positioning of the substrate,
- wherein the control unit acquires a plurality of types of the results of measurement by causing the measurement unit to perform a measurement using a plurality of types of measuring conditions in one time of the measurement and identifies candidates for a peripheral edge position of the substrate from each of the plurality of types of results of measurement;
- and
- a formation unit configured to form the pattern on the substrate processed by the substrate processing device.
Dependencies are inferred from the claim text.