Method for manufacturing an array including at least two memory cells and array therefor

Abstract

A method for manufacturing an array of memory cells including at least two memory cells, the method including providing a substrate; forming at least a first and a second cavity in the substrate; the first and second cavities being oriented such that the second cavity undergoes rotation by a non-zero angle about an axis normal to the substrate relative to said first cavity, the method including the following procedures implemented in each of the cavities: depositing a first conductive layer; depositing an active layer; depositing a second conductive layer; the method further including at least one ion implantation procedure such that the areas of the active layers exposed to implantation in the first and second cavities, which are oriented differently, are different.

Dependencies are inferred from the claim text.