Method for inspecting gallium nitride based semiconductor film, method for manufacturing gallium nitride based semiconductor device comprising the same, and layered structure used therefor
AssigneeJapan Display Inc.
InventorMasumi NISHIMURA
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Abstract
A method for inspecting a gallium nitride based semiconductor film includes preparing a layered structure including a substrate and a crystal orientation region and a crystalline region disposed on the substrate, forming a gallium nitride based semiconductor film on each of the crystal orientation region and the crystalline region, and evaluating a crystallinity of each of the gallium nitride based semiconductor films formed on the crystal orientation region and the crystalline region.
Claims12
A method for inspecting a gallium nitride based semiconductor film, comprising:
- preparing a layered structure including a substrate and a crystal orientation region and a crystalline region disposed on the substrate;
- forming a gallium nitride based semiconductor film on each of the crystal orientation region and the crystalline region;
- and
- evaluating a crystallinity of each of the gallium nitride based semiconductor films formed on the crystal orientation region and the crystalline region.
A method for manufacturing a gallium nitride based semiconductor device, comprising:
- preparing a layered structure including a substrate and a crystal orientation region and a crystalline region disposed on the substrate;
- forming a gallium nitride based semiconductor film on each of the crystal orientation region and the crystalline region;
- and
- evaluating a crystallinity of each of the gallium nitride based semiconductor films formed on the crystal orientation region and the crystalline region.
A layered structure comprising:
- a substrate;
- and
- a crystal orientation region and a crystalline region disposed on the substrate,
- wherein a gallium nitride based semiconductor film is formed on each of the crystal orientation region and the crystalline region.
Dependencies are inferred from the claim text.