Manufacturing method for a micro display
AssigneeInfineon Technologies AG
InventorsMatthias Markert, Cornelius Fuchs, Jakob Kriz
Life of this patent
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AssigneeInfineon Technologies AG
InventorsMatthias Markert, Cornelius Fuchs, Jakob Kriz
Estimating the term…
In an embodiment a method includes providing a substrate arrangement having a back end of line (BEOL) stack on a semiconductor substrate, wherein the BEOL stack comprises a plurality of structured wiring layers stacked and embedded in an insulating material structure (IMS), and wherein an upmost structured wiring layer of the plurality of structured wiring layers comprises a plurality of contact pads, after providing the substrate arrangement, locally removing portions of the IMS for exposing a first set of contact pads of the plurality of contact pads of the upmost structured wiring layer, and after locally removing portions of the IMS, depositing a conductive layer comprising a metallic material on a surface of the BEOL stack and structuring the conductive layer to provide a first structured portion of the conductive layer comprising a contact pad array and a second portion of the conductive layer that is arranged on the first set of contact pads of the BEOL stack.
A method comprising:
A method of comprising:
Dependencies are inferred from the claim text.