Solid precursor heating device for induction heating

A solid precursor heating device for induction heating, comprising:

• a stainless steel cylinder having a bottom plate, a peripheral wall, a cover, and a vapor output pipe, wherein the bottom plate and the peripheral wall define an interior space, the cover is provided on a top portion of the peripheral wall in a separable manner, the vapor output pipe is provided at the cover and is in communication with the interior space, and the stainless steel cylinder has a magnetic permeability higher than 1 H/m;
• and
• a plurality of vertically stacked trays provided in the interior space in a separable manner, wherein each said tray has an accommodating space, a supporting plate, an annular side, and a circular ring;
• wherein in each said tray, the accommodating space is defined between the supporting plate, the annular side, and the circular ring, the supporting plate is connected to a bottom portion of the annular side and is configured to support a solid precursor, the circular ring is connected to a top portion of the annular side, and the annular side is in close contact with the peripheral wall;
• wherein the lowest one of the trays is defined as a bottom tray, and the supporting plate of the bottom tray does not have a hollow portion;
• and wherein the supporting plate of each said tray other than the bottom tray rests on the circular ring of a said tray immediately below.