Mems controller and mems device

A Micro-Electro-Mechanical System (MEMS) controller, comprising:

• at least one control unit, wherein one of the at least one control unit comprises:
• two anchor structures, a first gap being formed between the two adjacent anchor structures, and each of the two anchor structures comprising a bottom surface and a top surface opposite to each other;
• and
• two cantilever beam structures respectively corresponding to the two anchor structures, each of the two cantilever beam structures comprising a first end and a second end opposite to each other, the first end of each of the two cantilever beam structures being located at the top surface of the anchor structure corresponding thereto, and the second ends of the two cantilever beam structures in one control unit directly facing each other and forming a second gap therebetween;
• and
• an encapsulation structure comprising a bottom plate, a side plate and a top plate connected in sequence, the bottom plate facing the top plate, and the side plate connecting the bottom plate and the top plate,
• wherein the bottom plate is located at the bottom surfaces of the two anchor structures, the bottom plate is provided with a first flow channel port penetrating through the bottom plate, the first flow channel port corresponds to the control unit, the first flow channel port is in communication with the first gap of the control unit corresponding thereto, the top plate is spaced apart from top surfaces of the two cantilever beam structures, the top plate is provided with a second flow channel port penetrating through the top plate, and the second flow channel port corresponds to the control unit.