Sampled grating distributed bragg reflector laser diode with distributed microheaters

A sampled grating distributed Bragg reflector laser diode comprising:

• a lower clad layer having a gain region, a first reflection region at one side of the gain region, and a second gain region at another side of the gain region;
• a waveguide layer provided on the lower clad layer, extending from the first reflection region to the second reflection region, and including a plurality of gratings provided in each of the first reflection region and the second reflection region;
• an upper clad layer provided on the waveguide layer, the upper clad layer having heating regions on the gratings and non-heating regions between the heating regions;
• and
• an upper electrode layer on the upper clad layer,
• wherein the upper electrode layer includes:
• a first upper electrode provided on the upper clad layer in the gain region;
• and
• a first wavelength-tunable electrode and a second wavelength-tunable electrode provided on the upper clad layer at both sides of the first upper electrode respectively,
• wherein each of the first wavelength-tunable electrode and the second wavelength-tunable electrode includes:
• a first heater electrode and a second heater electrode provided on the heating regions and the non-heating regions;
• and
• first plate electrodes and second plate electrodes provided on the first heater electrode and the second heater electrode in the non-heating regions.