Gas analysis device and control method

A method of controlling a system including a gas analyzer apparatus,

• wherein the gas analyzer apparatus includes:
• a sample chamber that is provided with a dielectric wall structure and into which a sample gas to be measured flows;
• a plasma generation mechanism for generating plasma inside the sample chamber, which has been depressurized, using an electric field and/or a magnetic field through the dielectric wall structure;
• a gas input apparatus configured to cause only the sample gas to flow from a process into the sample chamber;
• an electron ionization apparatus configured to ionize a part of the sample flown from the gas input apparatus;
• a first detector configured to output a first detection result for analyzing components of the sample gas with filtering ionized gas by the electron ionization apparatus;
• a second detector configured to output a second detection result for analyzing components of the sample gas with detecting light emission of ions in the plasma in the sample chamber;
• and an exhaust system configured to keep the sample chamber and a housing, which includes the electron ionization apparatus and the first detector, under negative pressure conditions,
• the method comprising outputting in synchronization a first detection result of the first detector and a second detection result of the second detector.