Contaminant removal device for arc reaction chamber and method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorLung-Yin Tang
Life of this patent
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Abstract
A contaminant removal device for an arc reaction chamber is provided. The contaminant removal device includes an impact generating device and a driver. The impact generating device is disposed on one side of the arc reaction chamber, and the driver is coupled to the impact generating device. The driver is used to provide a force to drive the impact generating device to move toward the arc reaction chamber.
Claims20
A contaminant removal device for an arc reaction chamber, comprising:
- an impact generating device arranged on one side of the arc reaction chamber;
- and
- a driver coupled to the impact generating device, and the driver being used to provide a force to drive the impact generating device to move toward the arc reaction chamber.
A contaminant removal device for an arc reaction chamber, comprising:
- a chamber holder arranged on one side of the arc reaction chamber, the chamber holder has a first surface, a second surface and an opening, wherein the first surface and the second surface are located on opposite sides of the chamber holder, and the opening penetrates the first surface and the second surface;
- and
- a movable plate pivotally connected to the chamber holder so that the movable plate is rotatable relative to the opening.
A method for removing contaminants in an arc reaction chamber, comprising:
- providing an impact generating device on one side of the arc reaction chamber;
- providing a force to the impact generating device to drive the impact generating device to move toward the arc reaction chamber;
- and
- causing the contaminants in the arc reaction chamber to peel off and fall down to a reservoir of the arc reaction chamber by the force, and the reservoir is used to collect the contaminants.
Dependencies are inferred from the claim text.