Correcting scan data
AssigneeASML Netherlands B.V.
InventorsVictor Emanuel CALADO, Andrea AMORESE, Jasper Frans Mathijs VAN RENS, Thomas Jarik HUISMAN
Life of this patent
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Abstract
A method for correcting scan data generated by scanning a sample with charged particles and detecting signal charged particles emitted from the sample, the method including selecting at least one scan profile for scanning the sample; and correcting scan data generated by the scanning of the sample, based on at least one known distortion function f(x,y) associated with the at least one selected scan profile.
Claims20
A method for correcting scan data generated by scanning a sample with charged particles and detecting signal charged particles emitted from the sample, the method comprising:
- selecting at least one scan profile for scanning the sample based on at least one known distortion function, indicative of distortion of scan data, associated with the at least one selected scan profile;
- and
- correcting scan data generated by the scanning of the sample, based on the at least one known distortion function associated with the at least one selected scan profile.
A charged particle-optical apparatus configured to scan a sample with charged particles and detect signal charged particles emitted from the sample, the charged particle-optical apparatus comprising:
- a charged particle-optical device configured to direct a charged particle beam onto the sample, according to a selected at least one scan profile selected based on at least one known distortion function that is indicative of distortion of scan data and is associated with the at least one selected scan profile,
- a detector configured to detect signal charged particles emitted from the sample, so as to generate scan data;
- and
- a controller configured to correct the scan data, based on the at least one known distortion function associated with the at least one selected scan profile.
Dependencies are inferred from the claim text.