Integrated vertical inductors
AssigneeAnalog Devices, Inc.
InventorsDeepak Kumar, Ruida Yun, Baoxing Chen
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Abstract
A method of manufacturing a vertical inductor, the method comprising: forming a substrate, forming a bottom electrode, forming a dielectric layer, forming a magnetic core, forming insulation layer, forming a conductive loop structure by extending vertical interconnects through the insulation layer from a first side of the magnetic core to a second side of the magnetic core, electrically connecting the vertical interconnects to the bottom electrode on the second side of the magnetic core.
Claims20
A method of manufacturing a vertical inductor, the method comprising:
- forming a substrate;
- forming a bottom electrode;
- forming a dielectric layer;
- forming a magnetic core;
- forming insulation layer;
- and
- forming a conductive loop structure by:
- extending vertical interconnects through the insulation layer from a first side of the magnetic core to a second side of the magnetic core, and
- electrically connecting the vertical interconnects to the bottom electrode on the second side of the magnetic core.
A vertical inductor comprising:
- a magnetic core disposed on a substrate, the magnetic core comprising insulated vias extending through a cross section of the magnetic core;
- and
- a conductive loop structure comprising vertical interconnects extending through the insulated vias from a first side of the magnetic core to a second side of the magnetic core, the vertical interconnects electrically connected to each other on the second side of the magnetic core by a horizontal conductive layer, the vertical interconnects comprising separate electrical connections on the first side of the magnetic core.
A system comprising:
- an electronic device;
- and
- a vertical inductor coupled to the electronic device, the vertical inductor comprising:
- a magnetic core disposed on a substrate, the magnetic core comprising insulated vias extending through a cross section of the magnetic core, and
- a conductive loop structure comprising vertical interconnects extending through the insulated vias from a first side of the magnetic core to a second side of the magnetic core, the vertical interconnects electrically connected to each other on the second side of the magnetic core by a horizontal conductive layer, the vertical interconnects comprising separate electrical connections on the first side of the magnetic core, the electronic device coupled to the separate electrical connections.
Dependencies are inferred from the claim text.