Device for layer thickness measurement and method therefor
AssigneeLeica Microsystems CMS GmbH
InventorsLinqi JIAO, Baiyang HU
Life of this patent
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Abstract
An imaging device for determining a thickness of a layer within an image is configured to obtain an image of a sample including the layer, obtain from a user interface a first estimation information indicating a location of a first edge of the layer, obtain from the user interface a second estimation information indicating a location of a second edge of the layer, determine the first edge of the layer in the image of the sample based on the first estimation information, determine the second edge of the layer in the image of the sample based on the second estimation information, and determine a distance between the first edge and the second edge.
Claims17
An imaging device for determining a thickness of a layer within an image, the imaging device configured to:
- obtain an image of a sample including the layer;
- obtain from a user interface a first estimation information indicating a location of a first edge of the layer;
- obtain from the user interface a second estimation information indicating a location of a second edge of the layer;
- determine the first edge of the layer in the image of the sample based on the first estimation information;
- determine the second edge of the layer in the image of the sample based on the second estimation information;
- and
- determine a distance between the first edge and the second edge.
A computer-implemented method for determining a thickness of a layer within an image, the method comprising:
- obtaining an image of a sample including the layer;
- obtaining from a user interface a first estimation information indicating a location of a first edge of the layer;
- obtaining from the user interface a second estimation information indicating a location of a second edge of the layer;
- determining the first edge of the layer in the image of the sample based on the first estimation information;
- determining the second edge of the layer in the image of the sample based on the second estimation information;
- and
- determining a distance between the first edge and the second edge.
Dependencies are inferred from the claim text.