Exposure apparatus, exposure method, and method for manufacturing holographic optical element

An exposure apparatus used for exposing a holographic optical element to light, comprising:

• a first light source that irradiates the holographic optical element with first light which is light with a predetermined wavelength range in order to detect a first diffraction efficiency which is a diffraction efficiency of the holographic optical element during exposure;
• a first detector that detects an amount of the first light;
• a second detector that detects an amount of second light which is the first light diffracted by the holographic optical element;
• a prediction device that calculates the first diffraction efficiency based on detection results of the first and second detectors, and predicts a second diffraction efficiency which is a diffraction efficiency of the holographic optical element after stop of the exposure according to the calculated first diffraction efficiency;
• a third light source that irradiates the holographic optical element with bleaching light;
• and
• a control device that controls an amount of the bleaching light according to a prediction result of the prediction device.

A method for exposing a holographic optical element to light, comprising:

• irradiating the holographic optical element with third light to which the holographic optical element is to be exposed;
• irradiating the holographic optical element with first light which is light with a predetermined wavelength range in order to detect a first diffraction efficiency which is a diffraction efficiency of the holographic optical element during exposure;
• detecting an amount of the first light;
• detecting an amount of second light which is the first light diffracted by the holographic optical element;
• calculating the first diffraction efficiency based on detection results of the first and second detectors, and predicting a second diffraction efficiency which is a diffraction efficiency of the holographic optical element after stop of the exposure according to the calculated first diffraction efficiency;
• and
• adjusting an amount of the third light according to a prediction result.

A method for exposing a holographic optical element to light, comprising:

• irradiating the holographic optical element with first light which is light with a predetermined wavelength range in order to detect a first diffraction efficiency which is a diffraction efficiency of the holographic optical element during exposure;
• detecting an amount of the first light;
• detecting an amount of second light which is the first light diffracted by the holographic optical element;
• calculating the first diffraction efficiency based on detection results of the first and second detectors, and predicting a second diffraction efficiency which is a diffraction efficiency of the holographic optical element after stop of the exposure according to the calculated first diffraction efficiency;
• and
• adjusting an amount of bleaching light emitted to the holographic optical element according to a prediction result.

A method for manufacturing a holographic optical element, comprising:

• irradiating the holographic optical element with third light to which the holographic optical element is to be exposed;
• irradiating the holographic optical element with first light which is light with a predetermined wavelength range in order to detect a first diffraction efficiency which is a diffraction efficiency of the holographic optical element during exposure;
• detecting an amount of the first light;
• detecting an amount of second light which is the first light diffracted by the holographic optical element;
• calculating the first diffraction efficiency based on detection results of the first and second detectors, and predicting a second diffraction efficiency which is a diffraction efficiency of the holographic optical element after stop of the exposure according to the calculated first diffraction efficiency;
• and
• adjusting an amount of the third light according to a prediction result.

A method for manufacturing a holographic optical element, comprising:

• irradiating the holographic optical element with first light which is light with a predetermined wavelength range in order to detect a first diffraction efficiency which is a diffraction efficiency of the holographic optical element during exposure;
• detecting an amount of the first light;
• detecting an amount of second light which is the first light diffracted by the holographic optical element;
• calculating the first diffraction efficiency based on detection results of the first and second detectors, and predicting a second diffraction efficiency which is a diffraction efficiency of the holographic optical element after stop of the exposure according to the calculated first diffraction efficiency;
• and
• adjusting an amount of bleaching light emitted to the holographic optical element according to a prediction result.