Underlayer film material for self-assembled film
AssigneeNissan Chemical Corporation
InventorsRyuta MIZUOCHI, Tomotada HIROHARA, Mamoru TAMURA
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Abstract
An underlayer film, which is a baked product of a coating film of an underlayer film-forming composition, in which in lithography using a resist film of either a photoresist film or an electron beam resist film and a self-assembled film, the underlayer film is used as an underlayer film of the resist film, and then is further used as an underlayer film of the self-assembled film, the underlayer film-forming composition contains a polymer and a crosslinking agent, the polymer has a unit structure (A) having a polycyclic aromatic structure and a unit structure (B) having a reactive group, and the crosslinking agent has a functional group that can react with the reactive group.
Claims26
An underlayer film, which is a baked product of a coating film of an underlayer film-forming composition, wherein
- in lithography using a resist film of either a photoresist film or an electron beam resist film and a self-assembled film, the underlayer film is used as an underlayer film of the resist film, and then is further used as an underlayer film of the self-assembled film,
- the underlayer film-forming composition contains a polymer and a crosslinking agent,
- the polymer has a unit structure (A) having a polycyclic aromatic structure and a unit structure (B) having a reactive group, and
- the crosslinking agent has a functional group that can react with the reactive group.
An underlayer film-forming composition for forming an underlayer film that is used, in lithography using a resist film of either a photoresist film or an electron beam resist film and a self-assembled film, as an underlayer film of the resist film, and then is further used as an underlayer film of the self-assembled film,
- the underlayer film-forming composition comprising a polymer and a crosslinking agent, wherein
- the polymer has a unit structure (A) having a polycyclic aromatic structure and a unit structure (B) having a reactive group, and
- the crosslinking agent has a functional group that can react with the reactive group.
Dependencies are inferred from the claim text.