Circuit comprising a step-up converter for controlling an actuator for driving an oscillating movement in an mems

A circuit for controlling an actuator for driving an oscillating movement of at least one movable component of a microelectromechanical system, MEMS, wherein:

• the circuit comprises a step-up converter circuit with an inductor, an electrical MEMS capacitor, and a first switching device that can be controlled by a controller;
• the MEMS capacitor is designed as a component of an actuator such that it forms a component of an electromechanical converter of the actuator, wherein the converter is configured to convert electrical energy stored in the MEMS capacitor into at least one mechanical variable for driving a movement of the actuator;
• and
• the first switching device is adapted to assume a first circuit configuration and sequentially a second circuit configuration depending on the controller, wherein
• in the first circuit configuration, a first current path through the inductor is continuously connected to cause an increasing current flow through the inductor fed by a supply voltage, and
• in the second circuit configuration, a capacitor-unbuffered second current path is continuously connected between a first pole of the inductor and the MEMS capacitor in order to charge the MEMS capacitor to a first voltage by means of a current flow fed at least partially by the inductor, the amount of which is equal to or higher than the supply voltage.