Apparatus and method for raman light detection
AssigneeStichting IMEC Nederland
InventorsMark ZENTILE, Mathijs VAN KILSDONK, Peter OFFERMANS, Joris VAN NIEUWSTADT, Jord Cornelis PRANGSMA
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Abstract
According to an aspect there is provided an apparatus for Raman light detection, said apparatus comprising: an illumination unit, configured to provide a wavelength modulation for generating and outputting wavelength modulated laser light towards a sample for inducing generation of Raman scattered light from the sample; a wavelength filter for filtering the Raman scattered light; and a light detector, configured to receive the Raman scattered light filtered by the wavelength filter and to provide an instantaneous response signal dependent on an intensity of the received Raman scattered light.
Claims14
An apparatus for Raman light detection, said apparatus comprising:
- an illumination unit, configured to provide a wavelength modulation for generating and outputting wavelength modulated laser light towards a sample for inducing generation of Raman scattered light from the sample;
- a wavelength filter for filtering the Raman scattered light;
- and
- a light detector, configured to receive the Raman scattered light filtered by the wavelength filter and to provide an instantaneous response signal dependent on an intensity of the received Raman scattered light.
A method for Raman light detection, said method comprising:
- providing, by an illumination unit, a wavelength modulation for generating and outputting wavelength modulated laser light towards a sample for inducing generation of Raman scattered light from the sample;
- filtering, by a wavelength filter, the Raman scattered light;
- and
- receiving, by a light detector, the Raman scattered light filtered by the wavelength filter;
- and
- providing, by the light detector, an instantaneous response signal dependent on an intensity of the received Raman scattered light.
Dependencies are inferred from the claim text.