Apparatus and method for high resolution raman spectroscopy
AssigneeStichting IMEC Nederland
InventorsMark ZENTILE, Jord Cornelis PRANGSMA, Peter OFFERMANS, Mathijs VAN KILSDONK, Joris VAN NIEUWSTADT
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AssigneeStichting IMEC Nederland
InventorsMark ZENTILE, Jord Cornelis PRANGSMA, Peter OFFERMANS, Mathijs VAN KILSDONK, Joris VAN NIEUWSTADT
Estimating the term…
There is provided an apparatus for Raman spectroscopy comprising: a tunable laser configured to output laser light towards a sample for inducing Raman scattered light from the sample, wherein a wavelength of the laser light is tunable; a light collecting and filtering arrangement configured to collect the Raman scattered light in a collection angle from the sample, wherein the arrangement provides the Raman scattered light as incident light onto a narrow bandpass filter comprising a transmission band with a FWHM of 0.2 nm, and preferably 0.02 nm or less, and wherein an angle of incidence of the incident light is matched to a filter acceptance angle of the bandpass filter; and a light detector, configured to receive the Raman scattered light filtered by the arrangement and to detect the Raman scattered light. The apparatus is configured to scan the wavelength of the laser light and to detect the intensity of the Raman scattered light by the light detector for forming a Raman spectrum of the sample.
An apparatus for Raman spectroscopy, said apparatus comprising:
A method for Raman spectroscopy, said method comprising:
Dependencies are inferred from the claim text.