Double-pass spectrometer using a flat reflective diffraction grating and multi-element lenses
AssigneeHoriba Instruments, Inc.
InventorsFeng Zhao, Aashish Tuladhar, Chris George, Jeremy Goldstone, Nicolas Vezard
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Abstract
A spectrometer includes an entrance aperture, a lens system that receives and collimates light, a flat reflective diffraction grating that diffracts and reflects the light back through the lens system, and a sensor that detects the returned light. The lens system collimates the light during a first pass and focuses it onto the sensor during a second pass. Various embodiments include selectable entrance apertures, imaging optics, different grating geometries and groove densities, and configurations supporting telecentric performance or multi-channel spectral acquisition.
Claims20
A spectrometer comprising:
- an entrance aperture configured to receive light from a sample;
- a lens system configured to collimate light from the entrance aperture;
- a flat substrate reflection diffraction grating positioned to receive light from the lens system and to diffract and reflect the light back through the lens system;
- and
- a sensor positioned to receive light from the flat substrate reflection diffraction grating after passing through the lens system, wherein the lens system is further configured to focus the light from the flat substrate reflection diffraction grating onto the sensor.
Dependencies are inferred from the claim text.