Micro-electro-mechanical system-based material corrosion electrochemical measurement sensor, preparation method therefor, and material corrosion electrochemical measurement equipment

A Micro-Electro-Mechanical System (MEMS)-based material corrosion electrochemical measurement sensor, comprising:

• a working electrode-auxiliary electrode module, comprising a first silicon substrate, a working electrode and an auxiliary electrode, wherein the first silicon substrate is provided with a recess portion, the working electrode is disposed on one side of an inner wall of the recess portion and a bottom of the recess portion, the auxiliary electrode is disposed on an opposite other side of the inner wall of the recess portion and the bottom of the recess portion, and the working electrode, the auxiliary electrode and the recess portion form an accommodation space;
• and
• a reference electrode module, comprising a second silicon substrate and a reference electrode, wherein the reference electrode is disposed on one side of the second silicon substrate and forms a protruding portion, and the second silicon substrate is provided with a through hole in a thickness direction thereof,
• wherein the protruding portion is disposed within the accommodation space, the working electrode, the auxiliary electrode and the reference electrode are not connected with one another, and the first silicon substrate is fixedly connected to the second silicon substrate;
• a spacing between the working electrode and the reference electrode is 1000 μm-2000 μm, and a spacing between the working electrode and the auxiliary electrode is 1000 μm-5000 μm;
• a cross section of each of the working electrode and the auxiliary electrode is L-shaped;
• and
• each of the working electrode, the auxiliary electrode and the reference electrode is made of a target metal material to be tested.