Microelectromechanical pressure sensor

Abstract

A microelectromechanical pressure sensor. The microelectromechanical pressure sensor includes a substrate and a first pressure sensor arrangement disposed on an upper side of the substrate. The first pressure sensor arrangement includes a first membrane, which is formed by an outer membrane layer of a layer sequence of the first pressure sensor arrangement that faces away from the upper side of the substrate. The substrate and the first membrane enclose a first cavity. The layer sequence includes an inner membrane layer, which is disposed in the first cavity and between the upper side of the substrate and the outer membrane layer. The outer membrane layer is at least partially mechanically and/or electrically connected to at least the inner membrane layer.

Dependencies are inferred from the claim text.