Sensor element and sensor device having same

A sensor element, comprising:

• a support member having a recess;
• and
• a sensing section configured to output a detection signal corresponding to a pressure of a medium to be measured, and being disposed on the support member and having a floating region formed by the recess, wherein
• the sensing section has a slit through which the medium to be measured passes is formed in a portion exposed to the medium to be measured, and
• a protective film made of a material having higher liquid repellency than that of the sensing section is provided in the slit while maintaining a state in which the medium to be measured passes, wherein
• the sensing section includes a first constituent layer, a first insulating film, a second constituent layer, a second insulating film, and a third constituent layer,
• the first, second, and third constituent layers are made of a silicon substrate,
• the first and second constituent layers are opposed to each other via a first predetermined gap and separated by the first insulating film,
• the second and third constituent layers are opposed to each other via a second predetermined gap and separated by the second insulating film,
• the second constituent layer is configured so that the portion floating above the recess constitutes a diaphragm portion, and
• the first constituent layer and the third constituent layer have a plurality of slits so that the medium to be measured passes through the diaphragm portion.