Pressure sensor

A pressure sensor comprising:

• a substrate having a first main surface and a second main surface opposing the first main surface, the substrate having a thickness direction extending between the first and second main surfaces;
• a first chamber recessed from the first main surface into the substrate;
• at least one second chamber recessed from the first main surface into the substrate and adjacent to the first chamber in a lateral direction orthogonal to the thickness direction;
• a fluid passage recessed from the first main surface into the substrate and configured to place the first chamber in fluid communication with an outside;
• a cover structure disposed on the first main surface and closing openings of at least the first chamber and the at least one second chamber at the first main surface;
• and
• at least one membrane partitioned by the first chamber and the at least one second chamber in the substrate between the first chamber and the at least one second chamber in the lateral direction, the at least one membrane extending in a plane that includes the thickness direction.