Vacuum pipe assembly, support unit, and substrate treating apparatus
AssigneeSemes Co., Ltd.
InventorKyung Sik SHIN
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a vacuum pipe assembly, a support unit, and a substrate treating apparatus. A vacuum pipe assembly according to an embodiment of the present disclosure includes a vacuum pipe disposed through a through-hole of a heater cup, and connected to a vacuum hole of a heating plate disposed above the heater cup; and a spring member installed in the heater cup, and elastically supporting the vacuum pipe toward the heating plate, wherein the vacuum pipe is installed in a floating structure, which is not fixed to the heater cup by the spring member.
Claims20
A vacuum pipe assembly, comprising:
- a vacuum pipe disposed through a through-hole of a heater cup, and connected to a vacuum hole of a heating plate disposed above the heater cup;
- and
- a spring member installed in the heater cup, and elastically supporting the vacuum pipe toward the heating plate,
- wherein the vacuum pipe is installed in a floating structure, which is not fixed to the heater cup by the spring member.
A support unit, comprising:
- a heating plate;
- a heater cup supporting the heating plate;
- and
- a vacuum pipe assembly installed through the heating plate and the heater cup,
- wherein the vacuum pipe assembly includes
- a vacuum pipe disposed through a through-hole of the heater cup, and connected to a vacuum hole of a heating plate disposed above the heater cup;
- and
- a spring member installed in the heater cup, and elastically supporting the vacuum pipe toward the heating plate,
- wherein the vacuum pipe is installed in a floating structure, which is not fixed to the heater cup by the spring member.
A substrate treating apparatus, comprising:
- a process chamber having a processing space for a substrate formed therein;
- and
- a support unit disposed in the processing space, and supporting and heating the substrate,
- wherein the support unit includes
- a heating plate;
- a heater cup supporting the heating plate;
- and
- a vacuum pipe assembly installed through the heating plate and the heater cup,
- wherein the vacuum pipe assembly includes
- a vacuum pipe disposed through a through-hole of the heater cup, and connected to a vacuum hole of a heating plate disposed above the heater cup;
- and
- a spring member installed in the heater cup, and elastically supporting the vacuum pipe toward the heating plate,
- wherein the vacuum pipe is installed in a floating structure, which is not fixed to the heater cup by the spring member.
Dependencies are inferred from the claim text.