Bellows joint fitting, method for treatment of process exhaust effluent, and processing apparatus
AssigneeASM IP Holding B.V.
InventorKenneth Honniball
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Abstract
This disclosure relates to a bellows joint fitting, a method for treatment of process exhaust effluent, and a processing apparatus. The bellows joint fitting has an upstream end for accepting process exhaust effluent and a downstream end for discharging the process exhaust effluent. The bellows joint fitting comprises one or more fluid inlets for introducing dilution fluid to be discharged via the downstream end with the process exhaust effluent.
Claims19
A bellows joint fitting having an upstream end for accepting process exhaust effluent and a downstream end for discharging the process exhaust effluent, the bellows joint fitting comprising a bellows pipe and one or more fluid inlets for introducing dilution fluid to be discharged via the downstream end with the process exhaust effluent.
Dependencies are inferred from the claim text.