Apparatus and method for growing silicon carbide
AssigneeTongwei Microelectronics Co., Ltd.
InventorsYintu Ba, Mingli Hu
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AssigneeTongwei Microelectronics Co., Ltd.
InventorsYintu Ba, Mingli Hu
Estimating the term…
The present disclosure provides an apparatus and method for growing silicon carbide, and relates to the technical field of growth of silicon carbide crystals. In the technical scheme of invention, wherein the seed crystal positioning cover is connected with the weighing apparatus through the bearing connector, and the seed crystal positioning cover and the growth crucible are in clearance fit, such that the growth crucible is prevented from supporting the seed crystal positioning cover; the weights of the seed crystal positioning cover, the seed crystals and the silicon carbide crystals are measured in real time through the weighing apparatus, and the weights of the seed crystal positioning cover and the seed crystals are constant, such that the weight of silicon carbide crystals can be precisely measured in real time, processes can be adjusted based on this, and therefore the growth quality of the silicon carbide crystals is improved.
An apparatus for growing silicon carbide,
A method for growing silicon carbide, comprising the following steps:
Dependencies are inferred from the claim text.