Method for depositing a layer of organic/inorganic hybrid or inorganic materials on a substrate

A process for the deposition of a layer of an inorganic or organic/inorganic hybrid material on a substrate for the manufacture of an active layer in an electronic, optoelectronic and/or optical device, said process comprising:

• a step of preparation of a target;
• a step of positioning the target on a susceptor in a sublimation furnace, said target being positioned in the furnace facing the substrate to be covered;
• and
• a step of heating the target via the susceptor in order to deposit the layer of inorganic or organic/inorganic hybrid material on the substrate by sublimation;
• wherein, the target comprising a plurality of subtargets, each subtarget having a central region and a peripheral region, the step of preparation of the target makes it possible to obtain subtargets having a variable thickness, the thickness of the central region and the thickness of the peripheral region being different, and/or the step of preparation of the target makes it possible to obtain subtargets which overlap.