Ceramic sintered body and plasma-generating electrode

Abstract

A ceramic sintered body which contains a first particular element consisting of five or six elements selected from among titanium (Ti), vanadium (V), zirconium (Zr), niobium (Nb), molybdenum (Mo), hafnium (Hf), tantalum (Ta), and tungsten (W); a second particular element consisting of one element selected from yttrium (Y) and aluminum (Al); and elemental carbon (C). The total amount of the first particular element, the second particular element, and elemental carbon contained in the ceramic sintered body is 98 at % or more. The amount of the second particular element contained in the ceramic sintered body is 3,000 at. ppm or less. The amount of carbon contained in the ceramic sintered body is 45 at % or more and 55 at % or less. The ceramic sintered body has a single phase microstructure in which the first particular element forms a solid solution.

Dependencies are inferred from the claim text.