US 2026/0175443 A1 · SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER METHOD USING THE SAME

Abstract

The present invention relates to a substrate transfer robot and a substrate transfer method using the same, and the substrate transfer robot according to one aspect of the present invention includes a body, a robot arm formed with a plurality of joints and rotatably installed on the body to transfer a substrate, a first sensor installed on the robot arm to sense a front edge of the substrate to be supported by the robot arm, a second sensor installed on the robot arm to sense a side edge of the substrate supported by the robot arm, and a controller provided on the body and configured to control the operation of the robot arm based on a value sensed by the first sensor and a value sensed by the second sensor.

Claims10

Dependent claims

A substrate transfer robot comprising:

a body;
a robot arm formed with a plurality of joints and rotatably installed on the body to transfer a substrate;
a first sensor installed on the robot arm to sense a front edge of the substrate to be supported by the robot arm;
a second sensor installed on the robot arm to sense a side edge of the substrate supported by the robot arm;
and
a controller provided on the body and configured to control operation of the robot arm based on a value sensed by the first sensor and a value sensed by the second sensor.

3 more elements

A substrate transfer method performed by a controller that controls operation of a pair of robot arms configured to transfer a substrate, the method comprising:

allowing one of the pair of robot arms to enter a loading box or equipment;
detecting a front edge of the substrate to be supported through a first sensor provided on the robot arm;
supporting the substrate through the robot arm;
bringing the substrate through the robot arm;
detecting a side edge of the substrate supported by the robot arm through a second sensor provided on the robot arm;
calculating a left-right deviation based on a joint angle of the robot arm at a time when the side edge is detected;
and
adjusting a preset loading position according to the left-right deviation.

5 more elements

Dependencies are inferred from the claim text.

Substrate transfer robot and substrate transfer method using the same

Life of this patent

Substrate transfer robot and substrate transfer method using the same

Life of this patent

Abstract

Claims10