Processing method, chip manufacturing method, and dressing member
AssigneeDisco Corporation
InventorYusuke IMAIZUMI
Life of this patent
Estimating the term…
Abstract
A processing method includes: holding a workpiece on a holding surface of a holding table; processing the workpiece by a grindstone tool; and dressing the grindstone tool by bringing a dressing member into contact with the grindstone tool while feeding the dressing member in a stretching direction, the dressing member containing abrasive grains and linearly stretching.
Claims8
A processing method comprising:
- holding a workpiece on a holding surface of a holding table;
- processing the workpiece by a grindstone tool;
- and
- dressing the grindstone tool by bringing a dressing member into contact with the grindstone tool while feeding the dressing member in a stretching direction, the dressing member containing abrasive grains and linearly stretching.
A chip manufacturing method for dividing a substrate into a plurality of chips, the substrate including devices formed in respective regions partitioned by a plurality of planned dividing lines, the chip manufacturing method comprising:
- holding the substrate on a holding table;
- cutting the substrate along the planned dividing lines by a cutting blade including a grindstone;
- and
- dressing the cutting blade by bringing a dressing member into contact with the cutting blade while feeding the dressing member in a stretching direction, the dressing member containing abrasive grains and linearly stretching.
A chip manufacturing method for dividing a substrate into a plurality of chips, the substrate including devices formed in respective regions partitioned by a plurality of planned dividing lines, the chip manufacturing method comprising:
- holding the substrate on a holding table;
- grinding the substrate by a grinding wheel including a grindstone;
- dressing the grinding wheel by bringing a dressing member into contact with the grinding wheel while feeding the dressing member in a stretching direction, the dressing member containing abrasive grains and linearly stretching;
- and
- cutting the substrate along the planned dividing lines by a cutting blade.
A dressing member for dressing a grindstone tool, wherein
- the dressing member contains abrasive grains at least on an outer surface,
- the dressing member has a linearly stretching shape, and
- the dressing member dresses the grindstone tool when the outer surface is brought into contact with the grindstone tool.
Dependencies are inferred from the claim text.