Polishing pad, polishing method, and method of manufacturing polishing pad
AssigneeCanon Kabushiki Kaisha
InventorsSHOTARO NOMURA, TAKUMI FURUKAWA, HIROAKI KOMATSU, SHOTA SEGAWA, KENICHI MOCHIZUKI
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AssigneeCanon Kabushiki Kaisha
InventorsSHOTARO NOMURA, TAKUMI FURUKAWA, HIROAKI KOMATSU, SHOTA SEGAWA, KENICHI MOCHIZUKI
Estimating the term…
Provided is a polishing pad, which is excellent in polishing rate and also excellent in maintainability of the polishing rate. The polishing pad has a surface where a bubble area ratio is maximum. The average aspect ratio of the openings of recesses derived from a plurality of bubbles in the surface where the bubble area ratio is maximum is 1.00 or more and 2.00 or less. The total value of the area-equivalent circle diameters of the openings of the recesses derived from the plurality of bubbles per unit area in the surface where the bubble area ratio is maximum is 9.0 mm/mm2 or more and 61.0 mm/mm2 or less. The bubble area ratio in the surface where the bubble area ratio is maximum is 55 area % or more and 95 area % or less.
A polishing pad for polishing an object to be polished with free abrasive grains,
A method of manufacturing a polishing pad, the method comprising introducing an uncured resin into a coaxial centrifugal molding apparatus, forming an uncured resin layer on an inner circumferential surface of the coaxial centrifugal molding apparatus with a centrifugal force, and heating and curing the uncured resin layer to produce a resin sheet,
Dependencies are inferred from the claim text.