Package structure
AssigneeAdvanced Semiconductor Engineering, Inc.
InventorCheng-Ling HUANG
Life of this patent
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AssigneeAdvanced Semiconductor Engineering, Inc.
InventorCheng-Ling HUANG
Estimating the term…
A package structure is provided. The package structure includes a first substrate, a first dielectric layer, and a first conductive element. The first dielectric layer is over the first substrate and has an opening defined by a sloped sidewall. The first conductive element is in the opening and has an upper surface. The first conductive element includes a first portion over the sloped sidewall and a second portion distinct from the first portion. The first portion and the second portion include a plurality of first nanotwinned layers and second nanotwinned layers stacked substantially along different respective directions defining an angle of greater than 0° and less than 90°. The upper surface includes two surface portions each being an upper surface of the first portion and an upper surface of the second portion of the first conductive element, and the two surface portions have different widths in a cross-sectional view.
A package structure, comprising:
A package structure, comprising:
A package structure, comprising:
Dependencies are inferred from the claim text.