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US 2026/0173559 A1Published application
Semiconductor light sensing
AssigneeIllumina, Inc.
InventorsArvin Emadi, Ravi Billa, Mohsen Rezaei, Craig Hetherington
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Abstract
There is set forth herein, in one example, a device comprising: a detector surface; an array of sensing photodiodes formed in a semiconductor formation, wherein the semiconductor formation receives light from the detector surface; and a light separating structure intermediate the detector surface and a sensing photodiode of the array of sensing photodiodes.
Claims20
A device comprising:
- a detector surface;
- an array of sensing photodiodes formed in a semiconductor formation;
- and
- a multilayer light separating structure comprising at least one dielectric layer, the multilayer light separating structure configured to preferentially transmit, for reception by the array of sensing photodiodes, photons of emission light relative to photons of excitation light.
1 more element
A method comprising:
- receiving, at a detector surface, excitation light and emission light;
- and
- preferentially transmitting, with a light separating structure, for reception by an array of sensing photodiodes formed in a semiconductor formation, photons of the emission light relative to photons of the excitation light, wherein the preferentially transmitting includes reflecting photons of the excitation light with an interference reflector comprising alternating layers of materials having different indices of refraction.
A device comprising:
- a detector surface;
- an array of sensing photodiodes in a semiconductor formation, wherein the semiconductor formation receives light from the detector surface;
- and
- a structure in a receive light path between the detector surface and a sensing photodiode of the array of sensing photodiodes, wherein the structure comprises alternating layers of a first material and a second material, the second material having a higher index of refraction than the first material, and wherein the structure is configured to preferentially transmit photons of emission light relative to photons of excitation light.
1 more element
Dependencies are inferred from the claim text.