Method for compensating mechanical and electrical nonlinearities of oscillators based on mems devices and mems system thereof

A method for compensating nonlinearities of a microelectromechanical oscillator that comprises:

• a microelectromechanical device comprising a movable structure and oscillating at a working frequency;
• a sustaining circuit configured to sustain oscillations of the microelectromechanical device;
• a compensation terminal capacitively coupled to the movable structure and configured to apply a compensation signal to the movable structure;
• and a modulation terminal cooperating with the sustaining circuit to control an amplitude of the oscillations of the microelectromechanical device;
• wherein the method comprises:
• applying a modulation signal having a modulation frequency to the modulation terminal;
• generating, in response to an output signal of the microelectromechanical oscillator, a read-out signal indicative of a frequency variation of the oscillations of the microelectromechanical device with respect to the working frequency;
• demodulating, in a synchronous manner, the read-out signal using the modulation signal, so as to obtain an error signal indicative of a phase difference between the modulation signal and the read-out signal;
• comparing the error signal with a reference signal;
• and
• generating the compensation signal from the comparison.