Surface emitting laser device and manufacturing method thereof

A manufacturing method of a surface emitting laser device, comprising:

• providing a surface emitting laser chip, wherein the surface emitting laser chip comprises a first type distributed Bragg reflective layer, an active layer, a second type distributed Bragg reflective layer, and an oxide layer, the active layer being configured on the first type distributed Bragg reflective layer, the second type distributed Bragg reflective layer being configured on the active layer, the oxide layer being configured at a side of the second type distributed Bragg reflective layer adjacent to the active layer, and the oxide layer having an opening for letting a light emitted by the active layer pass through;
• etching at least one recess at a top portion of a local region of the second type distributed Bragg reflective layer;
• and
• performing a local oxidation on the second type distributed Bragg reflective layer adjacent to the at least one recess to form an oxide region located above the opening;
• wherein
• the oxide region causes the second type distributed Bragg reflective layer to have a greater reflectivity in the local region than a reflectivity in a region outside the local region.