Battery state control during cross-section beam milling
AssigneeFEI Company
InventorsOndrej Klvac, David Trochta, Jan Lásko, Libor Novák, Peter Priecel
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Abstract
Sample shuttles are operable to electrically contact and secure samples during and after ion beam milling. During sample processing with an ion beam incident to a first sample surface along a first direction, sample electrical characteristics such as voltage or impedance are measured. Based on the measurements, sample electrical characteristics are adjusted by applying a voltage or a current, the sample shuttle is rotated to permit sample milling from a second direction. A non-conductive mask can be situated to reduce redeposition of material from shuttle surfaces on samples.
Claims27
A shuttle for securing a sample, comprising:
- a first jaw and a second jaw, the first jaw operable to be urged toward the second jaw, the first jaw and the second jaw defining a sample volume situated between an inner surface of the first jaw and an inner surface of the second jaw;
- and
- a shuttle base that includes a first electrical contact and a second electrical contact electrically coupled to the sample volume proximate the first jaw and the second jaw, respectively.
A method of ion beam milling a battery, comprising:
- situating a battery for exposure to an ion beam;
- directing an ion beam to the battery along a first axis;
- and
- with the battery situated for ion beam exposure, measuring at least one of an impedance, a conductivity, or a voltage associated with the battery.
Dependencies are inferred from the claim text.