Three-dimensional shape data generation apparatus

A three-dimensional shape data generation apparatus comprising:

• a pedestal for placing a workpiece thereon;
• a measurement unit including:
• a structured illumination unit that irradiates the workpiece with structured light for measurement;
• an imaging unit that receives the structured light irradiated by the structured illumination unit and reflected by the workpiece to generate pattern image data of the workpiece;
• a three-dimensional shape data generation unit that generates three-dimensional shape data of the workpiece based on the pattern image data generated by the imaging unit;
• a synthesis unit that synthesizes a plurality of pieces of three-dimensional shape data to generate synthetic three-dimensional shape data;
• a storage unit that stores one or more synthetic data files, each including a first relative positional relationship and a second relative positional relationship of a master workpiece with respect to the imaging unit;
• a reception unit that receives a selection of one synthetic data file from the one or more synthetic data files stored in the storage unit;
• and
• a measurement control unit that controls a relative movement between the pedestal and the measurement unit so as to reproduce the first relative positional relationship and the second relative positional relationship stored in the synthetic data file selected by the reception unit,
• wherein the three-dimensional shape data generation unit generates first three-dimensional shape data and second three-dimensional shape data of the workpiece based on pattern image data generated at the first and second relative positional relationships reproduced by the measurement control unit, and
• the synthesis unit generates synthetic three-dimensional shape data of the workpiece by synthesizing the first three-dimensional shape data of the workpiece and the second three-dimensional shape data of the workpiece based on an alignment between shapes thereof.