Manufacturing method for mechanical resonators
AssigneeNivarox-FAR S.A.
InventorsGeoffrey Chassin, Pierre Cusin
Life of this patent
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Abstract
A method for manufacturing a set of mechanical resonators (2a) having structural characteristics with an average value within a predetermined range, the method including a step in which the mechanical resonators (2b, 2c) and at least one oscillating member are formed (20) in the plate (1) (10a, 10b, 10c) and a step in which the dimensions of the resonators (2a) formed are modified (28) based on dimensional corrections calculated to obtain the set of resonators (2a) having structural characteristic values within the predetermined range of values.
Claims16
A method for manufacturing a set of mechanical resonators having structural characteristics with an average value comprised within a predetermined range of values, said structural characteristic being common to each resonator in said set, the method comprising the following steps:
- a) forming in said plate mechanical resonators with dimensions different from the dimensions necessary to obtain the set of mechanical resonators having structural characteristics comprised within said predetermined range of values;
- b) forming in said plate at least one oscillating member in an opening made in the plate, said member consisting of a trunk with a body joined at a first end to a securing part of a wall in this opening, and of two flexible arms joined at a second end of said trunk by a connecting part, said arms being parallel to an axis of symmetry (A) of said trunk and extending towards a part of said wall opposite the securing part, the body of said trunk comprising a portion between the first and second ends with an axial section (S4) that is smaller than the axial sections (S2, S1) of the first and second ends, respectively;
- c) determining a value relative to the structural characteristic of said at least one oscillating member formed;
- d) calculating dimensional corrections to be applied to the resonators formed, based on the value determined for the structural characteristic;
- e) modifying the dimensions of the resonators formed, based on the dimensional corrections calculated to obtain the set of resonators having structural characteristic values comprised within the predetermined range of values.
Dependencies are inferred from the claim text.