Optical metasurface structure and manufacturing method thereof
AssigneeUnited Microelectronics Corp.
InventorsDa-Jun Lin, Chin-Chia Yang, Fu-Yu Tsai, Bin-Siang Tsai
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Abstract
An optical metasurface structure includes a substrate, metal rail structures, and a liquid crystal material. The substrate includes a first region and a second region. The metal rail structures and the liquid crystal material are disposed above the first region. At least a part of the liquid crystal material is located between the metal rail structures adjacent to each other in a horizontal direction, and a top width of one of the metal rail structures is less than a bottom width of the one of the metal rail structures.
Claims20
An optical metasurface structure, comprising:
- a substrate comprising a first region and a second region;
- metal rail structures disposed above the first region;
- and
- a liquid crystal material disposed above the first region, wherein at least a part of the liquid crystal material is located between the metal rail structures adjacent to each other in a horizontal direction, and a top width of one of the metal rail structures is less than a bottom width of the one of the metal rail structures.
A manufacturing method of an optical metasurface structure, comprising:
- providing a substrate comprising a first region and a second region;
- forming metal rail structures above the first region;
- and
- forming a liquid crystal material above the first region, wherein at least a part of the liquid crystal material is located between the metal rail structures adjacent to each other in a horizontal direction, and a top width of one of the metal rail structures is less than a bottom width of the one of the metal rail structures.
Dependencies are inferred from the claim text.