Phase shifters including an electro-optic material
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
Estimating the term…
Abstract
Structures for a phase shifter and methods of forming such structures. The structure comprises a waveguide core and a metamaterial structure laterally adjacent to the waveguide core. The metamaterial structure includes a first plurality of portions and a second plurality of portions that alternate with the first plurality of portions. The waveguide core comprises an electro-optic material, the first plurality of portions comprise a first material having a first refractive index, and the second plurality of portions comprise a second material having a second refractive index that is less than the first refractive index.
Claims20
A structure for a phase shifter, the structure comprising:
- a first waveguide core comprising an electro-optic material;
- and
- a first metamaterial structure adjacent to the first waveguide core, the first metamaterial structure including a first plurality of portions and a second plurality of portions that alternate with the first plurality of portions, the first plurality of portions comprising a first material having a first refractive index, and the second plurality of portions comprising a second material having a second refractive index that is less than the first refractive index.
A method of forming a structure for a phase shifter, the method comprising:
- forming a waveguide core comprising an electro-optic material;
- and
- forming a metamaterial structure adjacent to the waveguide core, wherein the metamaterial structure includes a first plurality of portions and a second plurality of portions that alternate with the first plurality of portions, the first plurality of portions comprises a first material having a first refractive index, and the second plurality of portions comprise a second material having a second refractive index that is less than the first refractive index.
Dependencies are inferred from the claim text.