Photonic integrated circuit and method for annealing

Abstract

The present invention provides a photonic integrated circuit comprising a waveguide structure including a core layer and a cladding layer surrounding the core layer, the core layer having a higher index of refraction than the cladding layer, a local opening formed through a surface of the waveguide structure into the cladding layer adjacent to a functional part of the waveguide structure, and at least one heating element disposed between the core layer and the surface adjacent to the local opening in the cladding layer, the at least one heating element arranged and configured to provide heat to the core layer when activated. Further the present invention provides a corresponding method for annealing using the photonic integrated circuit as well.

Dependencies are inferred from the claim text.