Connection assembly and inspection device

An inspection device, comprising:

• a tester including a plurality of tester-side terminals;
• a probe card having a plurality of probes to be brought into contact with a substrate and a plurality of probe card-side terminals electrically connected to the plurality of probes;
• and
• a connection assembly configured to electrically connect the plurality of tester-side terminals and the plurality of probe card-side terminals,
• wherein the connection assembly comprises an intermediate connection member and a connection substrate stacked on the intermediate connection member,
• the intermediate connection member comprises:
• a plurality of connection pins configured to electrically connect the plurality of tester-side terminals and the plurality of probe card-side terminals, respectively;
• a first frame portion configured to hold one end of each of the plurality of connection pins;
• a second frame portion configured to hold the other end of each of the plurality of connection pins;
• and
• a housing space provided in either or both of the first frame portion and the second frame portion, and
• the connection substrate is stacked on either or both of the first frame portion and the second frame portion having the housing space, and comprises:
• a conductive part electrically connected to the plurality of connection pins;
• and
• an electronic component electrically connected to the conductive part and disposed in the housing space.