Thermal flow meter
AssigneeSurpass Industry Co., Ltd.
InventorsHiroshi Imai, Hiroki Igarashi
Life of this patent
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Abstract
Provided is a thermal flow meter including: a measurement tube having an inflow port into which a liquid flows and an outflow port out of which the liquid flowing in from the inflow port is allowed to flow and having an internal flow channel formed extending along an axis; and a temperature detecting substrate in which a heating resistance element and a temperature detecting resistance element are formed on a detection surface along the axis and the detection surface is joined to the measurement tube along the axis, and the measurement tube is formed of a thermal conductive fluororesin material containing a fluororesin material and a thermal conductive material that is dispersed in the fluororesin material and has higher thermal conductivity than the fluororesin material.
Claims8
A thermal flow meter comprising:
- a measurement tube having an inflow port and an outflow port and having an internal flow channel formed extending along an axis, wherein a liquid flows into the inflow port and the liquid flowing in from the inflow port is allowed to flow out of the outflow port;
- and
- a temperature detecting substrate having a heating resistance element and a temperature detecting resistance element formed on a detection surface along the axis, the detection surface being joined to the measurement tube along the axis,
- wherein the measurement tube is formed of a thermal conductive fluororesin material containing a fluororesin material and a thermal conductive material, the thermal conductive material being dispersed in the fluororesin material and having higher thermal conductivity than the fluororesin material.
Dependencies are inferred from the claim text.