Laminar flow restrictor and seal for same
AssigneeIchor Systems, Inc.
InventorsSean Joseph Penley, Zachariah Ezekiel McIntyre, Tyler James Wright, Matthew Eric Kovacic, Christopher Bryant Davis
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Abstract
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
Claims11
1-21. (canceled)
A gas flow apparatus for use with a processing chamber configured to process articles, the gas flow apparatus comprising:
- a base comprising a passage, wherein the passage comprises:
- an inlet configured to receive a gas flow;
- and
- an outlet;
- a flow restrictor positioned in the passage, the flow restrictor comprising:
- a first end in communication with the inlet;
- a second end in communication with the outlet;
- a longitudinal axis extending between the first end and the second end, wherein a first volume of the passage is defined upstream of the flow restrictor and a second volume of the passage is defined downstream of the flow restrictor;
- and
- a plurality of layers extending between the first end and the second end along the longitudinal axis;
- a first pressure transducer configured to sense the pressure of the gas flow in the first volume;
- and
- a second pressure transducer configured to sense the pressure of the gas flow in the second volume.
A gas flow apparatus for use with a processing chamber configured to process articles, the gas flow apparatus comprising:
- a base, wherein a passage extends through the base, and wherein the passage comprises:
- an inlet configured to receive a gas flow;
- and
- an outlet;
- a flow restrictor positioned in the passage, the flow restrictor comprising:
- an inlet end in communication with the inlet;
- an outlet end in communication with the inlet end;
- a longitudinal axis extending between the inlet end and the outlet end, wherein a first segment of the passage is defined upstream of the flow restrictor and a second segment of the passage is defined downstream of the flow restrictor;
- and
- a plurality of layers extending between the inlet end and the outlet end along the longitudinal axis;
- a first pressure transducer configured to sense the pressure of the gas flow in the first segment;
- and
- a second pressure transducer configured to sense the pressure of the gas flow in the second segment.
Dependencies are inferred from the claim text.