Robot system with supplementary metrology position determination system

A method for operating a supplementary metrology position determination system that is utilized with a robot,

• the robot comprising:
• a movable arm configuration, comprising:
• a first arm portion mounted to a first rotary joint at a proximal end of the first arm portion, the first rotary joint having a first rotary axis, wherein the first arm portion has a second rotary joint located at a distal end of the first arm portion, the second rotary joint having a second rotary axis;
• a second arm portion mounted to the second rotary joint at a proximal end of the second arm portion, such that the second arm portion rotates about the second rotary joint;
• and
• an end tool mounting configuration for mounting an end tool, wherein the end tool mounting configuration is located proximate to a distal end of the movable arm configuration;
• and
• a motion control system configured to control an end tool position of the end tool with a level of accuracy defined as a robot accuracy, based at least in part on sensing and controlling the angular positions of the first and second arm portions about the first and second rotary joints, respectively, using rotary sensors included in the robot;
• and
• the supplementary metrology position determination system comprising:
• first and second scales that are on the movable arm configuration, each scale comprising a plurality of respective imageable features;
• and
• first and second cameras;
• and
• the method comprising:
• operating the first camera to acquire a first image of the first scale at a first image acquisition time, wherein the first camera is coupled to the first arm portion such that the first camera rotates around the first scale and a field of view of the first camera moves along a first rotary measurement axis direction on the first scale as the first arm portion is rotated around the first rotary joint, and for which a bending of the first arm portion causes a movement of the field of view of the first camera along a direction that is transverse to the first rotary measurement axis direction on the first scale;
• and
• operating the second camera to acquire a first image of the second scale at the first image acquisition time, wherein the second camera is coupled to the second arm portion such that the second camera rotates around the second scale and a field of view of the second camera moves along a second rotary measurement axis direction on the second scale as the second arm portion is rotated around the second rotary joint, and for which a bending of the second arm portion causes a movement of the field of view of the second camera along a direction that is transverse to the second rotary measurement axis direction on the second scale.

A supplementary metrology position determination system for use with a robot that comprises a movable arm configuration with first and second arm portions, first and second rotary joints, and an end tool mounting configuration for mounting an end tool, and a motion control system configured to control an end tool position of the end tool, the supplementary metrology position determination system comprising:

• a metrology processing portion;
• first and second scales that are on the movable arm configuration, each scale comprising a plurality of respective imageable features;
• a first camera configured to acquire an image of the first scale at an image acquisition time, wherein the first camera is coupled to the first arm portion such that the first camera is configured to rotate around the first scale and a field of view of the first camera is configured to move along a first rotary measurement axis direction on the first scale as the first arm portion is rotated around the first rotary joint, and for which a bending of the first arm portion causes a movement of the field of view of the first camera along a direction that is transverse to the first rotary measurement axis direction on the first scale;
• and
• a second camera configured to acquire an image of the second scale at an image acquisition time, wherein the second camera is coupled to the second arm portion such that the second camera is configured to rotate around the second scale and a field of view of the second camera is configured to move along a second rotary measurement axis direction on the second scale as the second arm portion is rotated around the second rotary joint, and for which a bending of the second arm portion causes a movement of the field of view of the second camera along a direction that is transverse to the second rotary measurement axis direction on the second scale.