Method for processing insulation layer, method for producing redistribution layer, and processing apparatus

A processing apparatus for forming at least a plurality of via holes in an insulation layer formed on an upper surface of a base,

• the processing apparatus comprising:
• a first unit;
• a second unit;
• and
• a mold holder,
• wherein
• the first unit includes:
• a first stage;
• and
• a first material supply mechanism that supplies a first material having an elastic modulus equal to or lower than an elastic modulus of the insulation layer to cause the first material to spread in a predetermined range on an upper surface of the first stage,
• the second unit includes:
• a second stage for placing the base on which the insulation layer is formed;
• and
• a heating mechanism for heating the second stage,
• the mold holder is fitted with:
• a first moving mechanism that moves the mold holder at least between the first unit and the second unit;
• and
• a second moving mechanism that moves the mold holder toward each of the first stage and the second stage,
• an imprinting mold is detachably attached to a lower end of the mold holder, and
• the imprinting mold includes:
• a body;
• and
• a plurality of pillars projecting from a second surface of the body,
• wherein
• in the first unit, the first material is caused to adhere to a tip of each of the plurality of pillars, and
• in the second unit, the plurality of via holes are formed in the insulation layer by pressing and pressurizing the imprinting mold to which the first material is adhering against the insulation layer, using the mold holder.