Drive device, positioning device, processing device, and device manufacturing method

A drive device comprising:

• a first drive shaft that drives a driven body in a first direction;
• and
• a second drive shaft that drives the driven body and the first drive shaft in a second direction intersecting the first direction,
• wherein the second drive shaft includes a guide extending in the second direction and a slider movable along the guide,
• an end portion of the first drive shaft is provided to face one side surface of the slider, and a movable element of a linear motor that applies a driving force in the second direction to the slider is provided to face the other side surface of the slider,
• a connection member that connects the end portion of the first drive shaft and the movable element of the linear motor is provided above the slider, and
• a load receiving portion that receives a load from the connection member is provided between an upper surface of the slider and the connection member.