System of processing substrate, transfer method, transfer program, and holder

A substrate processing system comprising:

• an atmospheric-pressure transfer chamber in which a substrate and a consumable are transferred under an atmospheric-pressure atmosphere;
• a plurality of vacuum processing chambers for processing the substrate;
• a vacuum transfer chamber in which the substrate and the consumable, which includes a used consumable or an unused consumable, are transferred under a reduced-pressure atmosphere;
• at least one load lock module located between the atmospheric-pressure transfer chamber and the vacuum transfer chamber, through which the transferred substrate and consumable can pass;
• a plurality of load ports located in the atmospheric-pressure transfer chamber, wherein each of the load ports has a port through which the substrate or the consumable, transferred between the atmospheric-pressure transfer chamber and a respective one of a plurality of containers that store the substrate or the consumable, is capable of passing, and each of the plurality of containers is detachably attachable to the load port;
• a first transfer structure for transferring the substrate and the consumable between the at least one load lock module and the vacuum processing chamber via the vacuum transfer chamber;
• a second transfer structure for transferring the substrate and the consumable between the plurality of containers and the at least one load lock module via the atmospheric-pressure transfer chamber;
• and
• controller circuitry,
• wherein at least one of the plurality of load ports is attachable to a first container for substrates that stores the substrate and does not store the consumable, and a second container for consumables that stores the consumable and does not store the substrate.