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US 2026/0164859 A1Published application
Micro led array and micro led display panel
AssigneeJade Bird Display (Shanghai) Limited
InventorShuang ZHAO
Life of this patent
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Abstract
A micro LED array includes a first type epitaxial layer including: a first upper continuous layer; a first bottom mesa array comprising a plurality of first bottom mesas; and a bottom dielectric layer formed at a bottom of the first bottom mesa array and filled in a first trench; a bottom via array comprising a plurality of bottom vias formed at a bottom of the first bottom mesa array and in the bottom dielectric layer; a bottom reflective layer formed under the first bottom mesa, filled in the first trench and around the bottom via; a light emitting layer formed on a top surface of the first type epitaxial layer; and a second type epitaxial layer formed on a top surface of the light emitting layer.
Claims39
A micro LED array, comprising:
- a first type epitaxial layer including:
- a first upper continuous layer;
- a first bottom mesa array comprising a plurality of first bottom mesas, wherein the first bottom mesa array is formed at a bottom of the first upper continuous layer and extends down from the first bottom continuous layer;
- and
- a bottom dielectric layer formed at a bottom of the first bottom mesa array and filled in a first trench, the bottom dielectric layer comprising a plurality of metal vias, wherein one of the plurality of metal vias corresponds to a bottom of one of the first bottom mesas;
- a bottom via array comprising a plurality of bottom vias formed at a bottom of the first bottom mesa array and in the bottom dielectric layer, one of the bottom vias corresponding to one of the first bottom mesas;
- a bottom reflective layer formed under the first bottom mesa, filled in the first trench, and around the bottom via, wherein the bottom reflective layer is provided in the bottom dielectric layer;
- a light emitting layer formed on a top surface of the first type epitaxial layer;
- and
- a second type epitaxial layer formed on a top surface of the light emitting layer, comprising:
- a second bottom continuous layer formed on the light emitting layer;
- a second upper mesa array comprising a plurality of second upper mesas extending up from the second bottom continuous layer, wherein each of the second upper mesas comprises a plurality of projections and sunken portions;
- and
- a second trench formed between adjacent ones of the second upper mesas.
11 more elements
A micro LED display panel, comprising:
- an integrated circuit (IC) backplane comprising:
- a first dielectric layer formed on the IC backplane;
- and
- a top pad array comprising a plurality of top pads formed in the first dielectric layer;
- and
- a micro LED array bonded with the IC backplane, wherein the micro LED array comprises:
- a first type epitaxial layer including:
- a first upper continuous layer;
- a first bottom mesa array comprising a plurality of first bottom mesas, wherein the first bottom mesa array is formed at a bottom of the first upper continuous layer and extends down from the first bottom continuous layer;
- and
- a bottom dielectric layer formed at a bottom of the first bottom mesa array and filled in a first trench, the bottom dielectric layer comprising a plurality of metal vias, wherein one of the plurality of metal vias corresponds to a bottom of one of the first bottom mesas;
- a bottom via array comprising a plurality of bottom vias formed at a bottom of the first bottom mesa array and in the bottom dielectric layer, one of the bottom vias corresponding to one of the first bottom mesas;
- a bottom reflective layer formed under the first bottom mesa, filled in the first trench, and around the bottom via, wherein the bottom reflective layer is provided in the bottom dielectric layer;
- a light emitting layer formed on a top surface of the first type epitaxial layer;
- and
- a second type epitaxial layer formed on a top surface of the light emitting layer, comprising:
- a second bottom continuous layer formed on the light emitting layer;
- a second upper mesa array comprising a plurality of second upper mesas extending up from the second bottom continuous layer, wherein each of the second upper mesas comprises a plurality of projections and sunken portions;
- and
- a second trench formed between adjacent ones of the second upper mesas;
- and wherein each bottom via in the bottom via array corresponds to each first bottom mesa and is electrically bonded with each top pad in the top pad array, respectively;
- and the bottom dielectric layer is bonded with the first dielectric layer.
19 more elements
Dependencies are inferred from the claim text.