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US 2026/0163552 A1Published application
Resonator element, resonator, and oscillator
AssigneeSeiko Epson Corporation
InventorsYusuke Yamamoto, Ryuta Nishizawa
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Abstract
A resonator element includes a quartz crystal substrate having a resonator portion including a resonator region and a support portion having a thickness larger than a thickness of the resonator portion, and an excitation electrode disposed in the resonator region, in which when a surface roughness in the resonator region of the quartz crystal substrate is set to y [nm], and an oscillation frequency is set to x [MHz], y ≤ 11.4 exp (−x/174.8) + 1.8.
Claims11
A resonator element comprising:
- a quartz crystal substrate having a resonator portion including a resonator region and a support portion having a thickness larger than a thickness of the resonator portion;
- and
- an excitation electrode disposed in the resonator region, wherein
- when a surface roughness in the resonator region of the quartz crystal substrate is set to y [nm], and
- an oscillation frequency is set to x [MHz],
- 11-174y ≤ 11.4 exp (−x/174.8) + 1.8.
3 more elements
Dependencies are inferred from the claim text.