Multilayer piezoelectric substrate surface acoustic wave device with multilayer interdigital transducer electrode
AssigneeSkyworks Solutions, Inc.
InventorRei Goto
Life of this patent
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Abstract
A surface acoustic wave device is disclosed. The surface acoustic wave device can include a piezoelectric layer and a multi-layer interdigital transducer electrode in electrical communication with the piezoelectric layer. The multi-layer interdigital transducer electrode includes a first layer, a second layer, and a third layer between the first layer and the second layer. A first mass density of the first layer can be greater than a second mass density of the second layer, and a third density of the third layer can be greater than the second mass density. The second layer can be more flexible than the first and second layers, and the third layer can be more flexible than the first layer.
Claims20
A surface acoustic wave device comprising:
- a piezoelectric layer;
- and
- a multi-layer interdigital transducer electrode in electrical communication with the piezoelectric layer, the multi-layer interdigital transducer electrode including a first layer, a second layer, and a third layer between the first layer and the second layer, a first mass density of the first layer being greater than a second mass density of the second layer, and a third density of the third layer being greater than the second mass density.
A surface acoustic wave device comprising:
- a piezoelectric layer;
- and
- a multi-layer interdigital transducer electrode in electrical communication with the piezoelectric layer, the multi-layer interdigital transducer electrode including a first layer, a second layer, and a third layer between the first layer and the second layer, the second layer being more flexible than the first and second layers, and the third layer being more flexible than the first layer.
A surface acoustic wave device comprising:
- a piezoelectric layer;
- and
- a multi-layer interdigital transducer electrode in electrical communication with the piezoelectric layer, the multi-layer interdigital transducer electrode including a first layer, a second layer, and a third layer between the first layer and the second layer, the second layer includes aluminum, and the third layer includes titanium.
Dependencies are inferred from the claim text.